Research On The Magnetic Levitation Precision Stage With Mechachonics CAD/CAE

In this paper, the development trend of micro-electronics equipment ,the progress situation of precision work stage for laser photolithography equipment and the research and evolution of magnetic levitation technology in China and other countries are discussed generally. The main function, the demand of technical index and key technology of laser photolithography work stage are introduced simply. The magnetic levitation technology and the work principle of linear motor are stated , and the design and analysis method of Mechatronics CAD/CAE for magnetic levitation precision stage is presented. Moreover , practical significance of research on new magnetic levitation precision positioning stage with CAD/CAE method is illuminated.Combining magnetic levitation technology and linear motor drive technology, applying CAD/CAE method, a new magnetic levitation precise stage is designed and researched, which is step and precise position mechanism in 1C chip manufacture equipment of micro-electronics trade such as laser photolithography equipment. It is an innovative research. Applying magnetic levitation technology, the stage is suspended on the trail of inverse "F", thus the wear and tear is eliminated, linear motor non-contact drive makes precise position of stage. By means of Ugnxl.O, which is CAD/CAM/CAE software, The virtual prototye of six-dimension magnetic levitation position stage is designed conceptually, and the structure is logical. In order to research work principle and performance for magnetic levitation precise position stage, this paper mainly researches the principle prototype of the stage through Mechatronics CAD/CAE. The 3D solid models of the principle prototype were built , the mechanism simulation and interferential checks were done by using Ugnxl.O software. By translating three-dimension into two-dimension and drafting , the 2D draws were got. On the basis of CAD structure design, Electromagnetic field analysis and structure analysis are done by finite element method(FEM). Then a principle sample machine is maufacted, finally the test and experimentation are done.By magnetic field analysis for the stage, three formulas reached : one is magnetic road magnetic force calculational formula of magnetic levitation system that except flux leakage, the second is magnetic driving force calculational formula for open magnetic road DC linear motor, the third is Magnetic flux density calculational formula for DC linear motor . These formulas make reference for design , analysis and control. However flux leakage is really exist, calculation through formular analytic method has more error, so electromagnetic field analysis is made by using finite element method(FEM) in ANSYS7.1/Multiphysics and ANSYS/Emag programs. Typical quantities of interest in a magnetic analysis are available such as Magnetic flux density, Magnetic field intensity, Magnetic forces, Power loss and Flux leakage in the system of magnetic levitation . then gain the current in the coil which control levitation gap when the stage is stable. Considering that the magnetic levitation system is not axial symmetry structure, the 2D electromagnetic field analysis has error, so 3D electromagnetic field analysis is a bit close to reality. At last .combining with magnetic levitation control test, the validity of the finite element model in this paper and accuracy of simulation of 3D electromagnetic fieldanalysis are validated.On the basis of electromagnetic field analysis with ANSYS7.1, the result of magnetic force calculation is introduced to the software of MSC PATRAN/NASTRAN, and the analysis of statics and dynamics for magnetic levitation stag are effectively carried out through coupling the magnetic force with structure force. And then the dynamic character of magnetic levitation stage are logically evaluated. The results of analysis show that magnetic levitation stage has preferable dynamic stiffness. After modal test for magnetic levitation principle sample machine , through comparing finite element analysis and the result of tes...