Study On The Precision Stage Based On Magnetic Levitation Technology And Used In Micro-electron Manufacturing Field

The development status and trend of micro-electronics in China and others countries and the important influence of micro-electronics in the increase of world economy are discussed generally in this paper, and the research and development of laser lithography technology and equipment are summarized. The realistic significance, importance and feasibility of researching a new style of magnetic levitation(maglev) precision stage are narrated. Furthermore, the general theoretical technology of maglev and linear motor is showed also, and the structure principle of maglev-bearing and maglev-vehicle is described concretely.Referencing the existing laser lithography tools and according the structure principle of maglev-bearing and maglev-vehicle, two structure patterns of precision stage based on maglev technology and driven non-contactly by linear motor are designed and researched. The two maglev precision stages will be of freedom information property and adapt to develop and manufacture laser lithography tools by ourselves. After the contrast between performance and cost, the maglev precision stage with applying V-shaped symmetry structure is ascertained for the experiment model in the end. According to the V-shaped maglev precision stage, the hardness , damping and magnetic-road are analyzed, designed and calculated for the maglev system. The corresponding value ranges of above parameters are shown and the problems of design in the next stage are pointed out in this paper too.Through theory analysis for error that influence the vertical stabilization precision of the stage, the result showes that the negative influence that caused by the error of maglev system and acting on the stabilization precision of the stage working-point can be reduced, if set the work point on the center of the stage that determined by the maglev joint points.There are magnetic force coupling and displacement coupling on both horizontal y-axes and vertical z-axes in the maglev system of V-shaped stage, when the stage moves. The magnetic force coupling is analyzed and calculated. After building the dynamics model for the maglev system, discoupling design is run, and the simulation experiment with the leap response and capability of anti-jamming for maglev stage are carried out. The result illuminates that the maglev system is discouple completely, one input just only control one output, and the discoupling control system has good anti-jamming capability.By the Routh-Hurwitz rule, the stability of maglev system is analyzed theoretically. The result shows that maglev system is stable and controllable on the balance point( i0, z0 ) that corresponding to the stationary state.Mathematic equation for linear positioning move of the maglev stage is established. According to transfer function, after using the SIMULINK simulation module of MATLAB, simulation model of PID position feedback control for the stage positioning motion is constructed. Basing on the PID simulation model, simulation test for multinomial coefficients and parameters is carried out, and simulation experimental curves are gained. Through analyzing and comparing, the results are presented below: that applying light structure design and selecting larger elasticity coefficient linear motor can improve greatly displacement output dynamic capability of positioning system and controlling precision of position motion, and this is helpful to meet the demand of increase productivity.A variable damping system is conceived and designed. This system has very little even zero damping when stage starting; and then the damping becomes very strong when the stage is close to the positioning place. It makes the positioning stage not only has high response frequency and move sensitively, but also has high positioning precision.A principled sample machine of maglev positioning stage is manufactured. On different status, comparing tests are carried out for linear positioning motion of the sample. The result shows that the positioning precision when the sample is on maglev status...