Error Analysis And Structure Optimization Of Orthogonal Double Traveling Wave Magnetic Field Linear Time Grating

With the increasing development of the industrial field,high-precision products are an important factor in seizing the market,and high-precision displacement sensors are an indispensable part of the process of manufacturing high-end products.Displacement sensors play a vital role in the industrial field,and play an irreplaceable role in the fields of industry,agriculture,military,and aerospace in various countries.Among them,the absolute displacement measurement sensor has many advantages,such as better resistance to external interference,higher stability,no need to search for the reference zero point after startup,and lower cumulative error,etc.High-precision displacement measurement is widely used.At present,the traditional type of absolute displacement measurement sensor improves the resolution and accuracy of the sensor through ultra-precision scribing in space.However,the realization conditions of the ultra-precision scribing process are more demanding,requiring a vacuum processing environment and also High-precision and high-cost processing equipment,so these sensors are more expensive in the market.The time grating displacement sensor constructs two relative motion plane coordinate systems in space,and converts space to time to measure linear displacement and angular displacement.Therefore,the processing conditions of the sensor are less demanding,and the process is relatively simple.The cost will be lower.At this stage,the research on absolute displacement measurement in Shijia Laboratory is still relatively scarce,so the research on absolute linear displacement sensor is very necessary.In this case,this article proposes an error analysis and structure optimization method for time-grating displacement sensors,the main contents of which are:(1)The measurement principle of the orthogonal double traveling wave magnetic field linear time grating displacement sensor is theoretically deduced,and the generation mechanism of the orthogonal double traveling wave magnetic field and the calculation method of absolute displacement are theoretically analyzed and deduced.(2)A physical model of the orthogonal double traveling wave magnetic field linear time grating displacement sensor was established and simulated.The error of each frequency was analyzed in detail,and the specific error frequency and magnitude were obtained.(3)Theoretical analysis and simulation verification of the main error frequency of the sensor are carried out,the corresponding optimization scheme is formulated,and the simulation analysis is carried out.(4)According to the optimized physical model of the sensor,the actual sensor is made,an experiment platform is built,and the sensor function is tested.The stability experiment was carried out on the sensor,and the stability test was 5 ?m,and the accuracy test was done on the sensor.The original error peak-to-peak value measured by the experiment was 102?m,which was reduced by nearly 300?m compared to the400?m before optimization.The final experimental data shows that the sensor can meet the corresponding requirements of the measurement,and the measurement accuracy of the produced sensor prototype is greatly improved within the range,from the original ±12?m to 12?m,which is doubled.