Research On Array Structure Design And Pressure Sensing Characteristics Based On Coupling Frequency Multiplication Mechanism

Resonant pressure sensors based on MEMS sensing technology have always been a research hotspot in the sensor field.At present,with the development of industrial technology,the scientific and technological society has rapidly increased the requirements for sensor detection accuracy,detection speed and sensitivity.How to develop high-performance sensors has become an urgent problem to be solved.The resonant pressure sensor has the advantages of high sensitivity,short response time,small size,easy integration and convenient portability.However,the existing resonant pressure sensor has a single structure,and its performance such as sensitivity and accuracy needs to be further improved.Therefore,this paper proposes a pressure sensing array based on the coupled frequency multiplication mechanism,which can improve the sensitivity of pressure detection.And through theoretical and simulation analysis,it is preliminarily proved that the array can obtain the size and position,size and direction of the pressure to be measured at the same time,which not only reduces the detection error caused by the change of the spatial position of the pressure to be measured,improves the detection accuracy,but also makes the array to realize multi-parameter detection and expand the application field of the array to a certain extent.Secondly,through simulation analysis,the effectiveness of the two methods of obtaining the pressure and position,pressure and direction at the same time is preliminarily verified.This method not only improves the detection accuracy of the pressure detection array,but also enables the resonant array to achieve multi-parameter detection to a certain extent.Then,the paper puts forward the pressure sensing characteristic experiment plan of the coupled frequency multiplication array,designs the pressure detection experiment,builds the experimental platform and manufactures the experimental prototype.The pressure detection characteristic experiment of the coupled frequency multiplication array is carried out to confirm the coupling frequency multiplication mechanism and verify the correlation between the natural frequency of the resonant beam and the pressure to be measured.By comparing the natural frequency changes of the fixed beam and the cantilever of each unit in the experiment,it is proved that the coupling frequency multiplication mechanism can improve the sensitivity of pressure detection within a certain range.Finally,the paper optimizes the design of the resonant array to further improve its sensing performance.This paper proposes a coupled frequency multiplication array,and studies its pressure sensing characteristics,which effectively improves the sensitivity and accuracy of pressure detection,and provides a choice for the engineering needs of highsensitivity detection of pressure.In addition,the paper elaborates on various optimization designs of the resonant array,which has a high reference value in the design and development of resonant pressure sensors.