Structural Design And Characteristics Research On Pressure Sensors Frequency Doubling Structures

With the rapid development of electronic information technology,especially the industrial 2025 demand for industrial restructuring,In the fields of industrial control,clinical medicine,biological detection,aerospace,and military,the requirements for the detection accuracy,detection speed,and sensitivity of pressure and other parameters have rapidly increased,and the current technical capabilities are obviously insufficient.How to develop high-performance sensors is a very urgent issue.Resonant pressure sensors use frequency signals as output signals and can be directly connected to digital interfaces,the problem of poor anti-interference ability of sensor is solved..However,the structure of the existing oscillating pressure sensor is single,and the parameter performance such as sensitivity needs to be further improved.Therefore,based on the nonlinear frequency multiplication mechanism,this paper proposes a new type of frequency doubling structures pressure sensor,which can double the sensitivity of the sensor.Array sensor structure is designed,which not only reduces the detection error of the sensor,but also helps to distribute the pressure evenly and improves the reliability and stability of the sensor.Firstly,based on the study of the resonant vibration characteristics of the resonant pressure sensor,the mathematical model of the relationship between the pressure and the natural frequency of the resonant beam of the sensor is established,and the influence of the resonant beam structure on its natural frequency is discussed through finite element analysis.The three-dimensional model of the sensor is established to study its static and dynamic vibration characteristics,and the structural size of the sensor is optimized through simulation analysis.An array-based structure based on a novel resonant unit is proposed to further improve the sensor performance.Secondly,through the research of the sensor processing technology,the MEMS processing technology is designed to meet the technical requirements of the sensor structure proposed in this paper.Then put forward the sensor experiment scheme,design the sensor signal test system,complete the construction of the sensor experiment platform and simplify the processing of the sensor device.The feasibility of the nonlinear frequency multiplication mechanism is verified by the unit resonant structure sensor experiment.The sensitivity analysis experiments of the two structures of the unit and the array are performed.It is concluded that the pressure of the sensor increases with the pressure acting on the pressure-sensitive film,and the natural frequency of the resonant beam will increase.The experimental results show that the sensor has high sensitivity and linearity.The new pressure sensor structure proposed in this paper effectively improves the detection sensitivity of the sensor.S Selection is provided for high sensitivity test engineering requirements.The paper also discusses the influence of different parameters on sensor performance in detail.It has a high reference value in the design and development of resonant pressure sensors.