Design And Fabrication Of High-Q Silicon Microring Resonator

For more than half a century,microelectronic chips,as the core device of communication modules,have been driving the development of the information age.With the innovation of information technology,communication systems require high-capacity,high-speed,and low-power functional devices,which also means that chips with a smaller manufacturing process need to be manufactured to meet this demand.However,due to the limitation of quantum effect,the research and development of microelectronic chips will be difficult to continue to follow Moore's Law.Silicon photonics platform is characterized by high speed,low cost and large bandwidth,which is compatible with CMOS processes.It is currently one of the most promising photonic integration platforms and can meet the needs of future communication systems.As the basic components of optical chips,high-Q silicon microcavities are widely used in filtering,modulation,delay and other aspects in the field of silicon photonics due to their small size,simple structure,and ease of integration.High-Q silicon microcavities have extremely high energy storage capacity,which are the one of the important components of devices such as photoelectric oscillators and biosensors.Improving the Q-factor is the direction of efforts of many researchers around the world.In this dissertation,high-Q silicon microrings and microdisks resonators with three kinds of different structures are proposed by in terms of the principle of improving the Q-factor of microrings.The main content is summarized as the following:(1)The research status of silicon microring and microdisk resonators are reviewed,and the research results of improving the surface roughness of silicon waveguides are summarized internationally.The important parameters of the microring and the main factors affecting the Q-factor of the microring resonator are analyzed,and the manufacturing process of the silicon microring resonator is introduced.(2)A non-concentric circle high-Q silicon microring resonator is designed.The transmission characteristics and Q-factor of the device are analyzed by simulation.Experimental results verify the feasibility of improving Q-factor with this structure.The oxidation and annealing methods are used to further optimize the microring sidewall optimization.The results show that the highest Q-factor of the non-concentric circle microrings increased from ten thousand to one hundred thousand.(3)A ridge waveguide microdisk resonator and a racetrack type high-Q silicon microring resonator are designed.The transmission characteristics of these two structures are analyzed theoretically.The transmission spectrum and the Q-factor of resonance peak of the two new structures are experimentally tested.The experimental results showed that the highest Q-factors of the two devices have reached 1.9×10~5 and 1.49×10~5respectively.