Research On The Transmission Characteristics Of Silicon-Based Microring Resonator

Integrated microelectronics technology had been invented for nearly half a century, and it has received a great development. However, its basic principle-Moore’s Law reaches the limit, so it has difficulty in further development, and needs breakthroughs in technology. The semiconductor material of "Silicon" which is widely used in manufacturing large scale integrated circuit has obtained great development in studying electrical properties and manufacturing process. So it is difficult to get achievement in these two fields. Recent research suggests that silicon materials and silicon-based materials had excellent optical properties as well as electrical properties, and initially achieved in the laboratory of silicon and silicon-based materials in light generating, transmission, modulating, interconnection, detecting and so on. As one of the most promising optoelectronic integrated solutions, Silicon-based optoelectronic integrated technology is another revolutionary technology after microelectronics integration technology, also has enormous aeconomic and strategic significances in the construction and implementation of the future information society.With properties of small frame size, high integration, low cost, silicon-based microring resonators is the core modulation device of silicon optoelectronic integrated system. By combining its resonance characteristics with silicon material’s thermo-optic effect, plasma dispersion effect, quantum confinement Adams Tucker effect, functions, such as high-speed modulators, high-speed optical switches and tunable filters, can be achieved in silicon-based integrated system, Silicon-based microring resonator is one of the most widely used silicon-based devices, and has the great value in research.Therefore, this paper did some research on the transmission characteristics of silicon-based microring resonator. The main work is as follows:(1)Via using coupled-mode theory (CMT), we derived the coupling coefficients of silicon micro-ring resonator in two-dimensions, which is verified by numerical simulation results. Finally, we got the relationship between the coupling coefficients and silicon-based microring resonator structure parameters.(2)We operated a lot of numerical simulation to the silicon-based microring resonator by using finite difference time domain (FDTD), got the conclusion that how silicon-based microring resonator structure parameters effect the transmission spectrum of the device, and analyzed the simulation results theoretically.(3) Introducing the concept of microwave network, and the silicon-based microring resonator is equivalent to a four-port network. We deduced the scattering matrix of the network by coupled mode theory and optical interference method, and verified it by numerical simulation results.