Study On The Measurement And Refinement Of XRD Patterns Of Phase Change Materials

The material structure is very concerned in the field of material research.XRD is the most powerful tool to study the material structure.Phase change storage materials use the rapid phase transformation and property difference between different phases to store information,and the structure difference between different phases is the main reason for the performance difference.Therefore,the XRD measurement of its structure is very important for studying the physical properties of the material,guiding the structure improvement and looking for better materials.In this paper,the reflex module of Materials Studio is used to fit and refine the X-ray diffraction patterns of Ge Sb,Sb₉₀Si₁₀,Te and Ag,and a cell model is obtained to match the pattern.From the results,the pattern matching is good,which indicates that the refined cell model has a high similarity with the actual model,which can be considered as XRD to measure the structure of materials perfectly.The main work of this paper includes:1.Based on the reflex module of materials studio,the X-ray diffraction patterns of Ge Sb,Sb₉₀Si₁₀,Te,Ag and other materials commonly used in phase change memory were fully fitted and refined.A cell model was obtained and the matching ray diffraction pattern was fully fitted and refined,and a cell model was matched with the spectrum.The results show that the refined cell model has a high similarity with the actual situation.2.Ge Sb and Sb₉₀Si₁₀ thin films were prepared by magnetron sputtering.After annealing and crystallization,the samples were tested by XRD.The space group of the diffraction patterns was determined by back-to-back and peak seeking operations.A cell model was obtained and refined to match the experimental data.By changing the parameters,the fitting error is minimized,and the optimized cell model is obtained.The fitting curve of the cell model obtained in this paper can be directly compared with the original experimental data points,and the fitting degree can be seen intuitively and vividly,and the results obtained are more convincing.