Design And Experiment Of A Novel Non-resonant Rotary Inertial Piezoelectric Actuator

With the rapid development of semiconductor industry,optical engineering,aerospace,ultra-precision processing,biomedicine,etc.,the traditional electromagnetic motor is restricted by the working principle and structure,and gradually cannot meet the current high-precision micro-nano drive work requirements,therefore,research on new non-electromagnetic micro/nano precision drive technology represented by piezoelectric drive has gradually emerged.Among the various new micro/nano actuators,piezoelectric actuators have attracted many domestic and foreign researchers input research due to obvious advantages such as high precision,fast response,high efficiency,electromagnetic compatibility,high stability,compact structure and closed-loop control with sensors,etc.,the inertial piezoelectric motor based on the inverse piezoelectric effect and the principle of inertial displacement does not require a clamping mechanism and an intermediate conversion structure,it has special advantages in stroke,resolution,and hysteresis and creep and has becoming a high-precision positioning device,medical machinery,and micro-robot Research and development hotspots in the precision drive field.Many of the existing rotating inertial piezoelectric motors are designed with a guided shaft structure,which requires high matching accuracy between the output shaft and the shaft hole,and also limits the use scenarios of rotating inertial piezoelectric motors to a certain extent,therefore,this subject proposes a design scheme for rotating inertial motors without guiding shafts around the centerline of the structure with the basis of the existing rotating inertial piezoelectric motors.The research work of this article can be divided into the following parts:(1)The classification and characteristics of piezoelectric motors and the development status of inertial piezoelectric motors at home and abroad are introduced.Combining the existing design schemes of inertial piezoelectric motors,some deficiencies in the existing rotating inertial piezoelectric motor schemes are put forward,which leads to the research significance of this subject.(2)The piezoelectric material types,piezoelectric effects,and basic characteristics of piezoelectric materials are systematic introduced,the structure,wiring method and support method of the piezoelectric bimorph vibrator are analyzed,and perform theoretical analysis on the vibration of the selected cantilever support method,all theories provide a theoretical basis for the design of inertial piezoelectric motors for this subject.(3)On the basis of the inertial piezoelectric motion mechanism,the motion mechanism of the rotating inertial piezoelectric motor in this subject is introduced.The main points of the piezoelectric vibrator,moment of inertia and friction moment driven by the motor are theoretically analyzed.Based on the above principle analysis and theoretical calculation,the structure of the rotating inertial piezoelectric motor of this subject is designed.(4)Before the experiment,use simulation software to simulate and analyze the motor,combined with the analysis of the modal shape and amplitude-frequency characteristics,to obtain the appropriate driving mode and frequency range.The theoretical reference results of the transient analysis also further confirm the design.The rationality and feasibility provide a basis for the next experimental measurement.(5)An experimental platform was built for testing,the experiment tested the forward and reverse motion curves of the rotating inertial piezoelectric motor.The result of the motion curve proved the feasibility of the design scheme of the subject,and it can achieve the driving effect of the rotation motion in the specified direction.At the same time,the control variable method was used to test the relationship between the rotation step length of the motor and the voltage and frequency,the important performance parameters of the motor such as speed and rotation resolution were also measured,the successful design of this subject provides a new design reference idea for the subsequent design of rotating inertial piezoelectric motors.