Simulation Analysis And Experimental Research On The Shear Piezoelectric Inertial Actuator

Unceasingly along with the science development, drive transmission technology also in innovation, after a large number of innovative development,from the traditional driving mechanism to traditional precision drive to all kinds of new drive technologies continue to emerge. Ultra-precision positioning technology has become a modern high-tech science and technology reflects and important support. The rapid development of modern science and technology, but also ultra-precision positioning technology made more applications.With the rapid development of modern science and technology, the ultra precision positioning technology proposed more and more application requirements. Precise actuator is the core component of all kinds of design for the high precision positioning technology, in the framework of the whole positioning can be a power output component, and can be used as executive component. At the same time, precise actuator in aerospace, biomedical,micro/nano electromechanical systems, scientific instruments, and other fields has become one of the important technical support. Domestic and foreign scholars are beginning to come in-depth study of modern precision drive, as a focus of research.Trying to develop a more advanced design, better performance precision drive, which also vigorously promote the development of ultra-precision positioning technology.In recent years, new types of precision drives continue to emerge, so that more scholars believe that this area will become a leader in the development of modern science and technology.The domestic and foreign research of driver especially pressure electric drive development present situation has carried on the analysis, on this basis to inverse piezoelectric effect of shear effect mechanism, using a shear type piezoelectric stack as drive unit, the design of a new type of shear piezoelectric inertial actuator. Piezoelectric ceramics features and flexible hinge properties were researched and analyzed. The shear pressure electrical inertial actuator structure and motion mechanism were introduced in detail, the drive principle were analyzed. Using ABAQUS finite element simulation software to drive flexible hinges were mechanics simulation and modal analysis of the device to verify the feasibility of the design. Pressure electrical inertial actuator prototype for shear is developed. Using the Lab-VIEW software design the PID closed-loop control system, improves the positioning accuracy and reciprocating motion system stability device. By building shear inertia piezoelectric drive test system, test and study how to drive performance test. From the test,We obtain a relationship between the moving step of shear piezoelectric inertial drive and theOutput signal voltage, output signal frequency, vertical load.The relation between speed of motion and output signal frequency.The resolution of the shear piezoelectric inertial actuator is 0.1 um, Maximum movement speed is 2mm/s.The effective operating voltage is 40- 200 V,the effective operating frequency is 1- 600 Hz.