Design And Experimental Research Of An Inertial Piezoelectric Precision Actuator By Means Of Stick-slip Motion

With the rapid development of modern science and technology, cutting-edge fieldof micro and nano-tech operation, precision optics, ultra-precision processing andassembly, biomedical, aerospace technology and micro robots are constantly developand progress, and its core technologies-precision drive technology has a highertechnical requirements. Meanwhile scientists from various countries around the worldactively engaged in the development of new precision drive design and development,in order to meet the high precision drive demand for frontier areas. Currently, the newprecision drive sprung up, and greatly promoted the precision drive technologyforward. The piezoelectric actuator based on the principle of inertia are widely used inthese areas and has broad application space, due to its stick-slip compact, stable andreliable performance, stroke, high motion accuracy, high frequency response,anti-magnetic interference and other advantages.This paper systematically analyzed the development status in the field ofprecision driving position, given the advantages and disadvantages of various types ofdrives, as well as applications.In order to promote inertial piezoelectric actuator, designand develop a new type of precision inertial piezoelectric drive. The precision inertialpiezoelectric drive relies on piezoelectric technology and flexible hinge technology.The result of integrate scanning precision fine-tuning mode by PID loop control systemwith the preliminary stepping mode not only increases the drive’s movement stroke,but also greatly improves the positioning accuracy of the drive, which positioningaccuracy can reach the nanoscale.This paper designed and developed precision piezoelectric inertial drive by meansof stick-slip motion includes a drive source-stacked piezoelectric ceramics and apower transmission-displacement amplification mechanism "bridge" flexible hinge.The dynamics properties of stacked piezoelectric ceramics have being simulated bySimulink simulation software. The strength, stiffness, and other properties of the "bridge" flexible have being simulated by ABAQUS.The inertial piezoelectric actuator has two drive modes: stepping mode (step-typemode) and scanning mode (scan-type mode). Stepping coarse adjustment mode drivesystem combines scanning precision inertial piezoelectric actuator precisionpositioning control, not only achieves a large range drive also improves the positioningaccuracy of the drive. In order to eliminate the influence of nonlinear factors systems,design precision positioning drive and accuracy of the closed loop control system toimprove the stability. This paper describes the composition and function of eachmodule of the entire closed-loop control system, and the use of LabVIEW graphicaldesign language (G language) designed the drive PID closed-loop control systemprogram. Finally, tested the drive PID closed-loop control system, which positioningaccuracy e=±10nm.In this paper, the theoretical basis of the principles and stick-slip-typepiezoelectric actuator inertia mechanical dynamics simulation of the design work onthe trial of the inertial test prototype piezoelectric actuators.The dynamic outputperformances of the inertial piezoelectric actuator stepping mode (stick-slip) such asthe relationship with the voltage step, step length and frequency of the relationship, therelationship between step size and load stability stepper drives, reciprocating accuracymportant have being tested by an entire test system. The range of effective workingvoltage, effective frequency and stable carrying capacity respectively is70-100V,1-550Hz and0-5N.The maximum traction, maximum and the biggest single steprelative error carrying capacity respectively is.58N,50N and0.046μm. The single steprelative error rate of the inertial piezoelectric actuator is less0.5%. The resultsdemonstrate that the design and development of the precision inertial piezoelectricactuator by means of stick-slip motion has the perfomancese of good positioningaccuracy, carrying capacity, towing capacity and stability of motion.