Design Of Rigid-flexible Coupling Rotary Stage

Rotary stages have been widely used in new generation electronic manufacturing,laser processing equipment,precision testing instruments and military and national defense applications.In particular,the high-precision rotary stage is the basic component of targeting devices such as photoelectric radar and laser satellite communication.If the rotary stage achieves higher angular positioning accuracy and tracking accuracy,it can make the detection distance farther,achieve victory over the enemy,and ensure national defense security.Due to the influence of bearing friction,the speed fluctuation and return error caused by the friction stick-slip phenomenon seriously affect the positioning accuracy and tracking accuracy of the rotary stage.In order to improve the accuracy of the rotary stage to achieve long-distance detection,the macro-micro composite positioning system can only be formed by adding a pendulum mirror.However,the macro-micro composite positioning system has the disadvantages of low macro-micro switching control efficiency and high cost of two sets of drives.In order to make the rotary stage achieve higher positioning accuracy and tracking accuracy,and make the detection distance farther,this thesis proposes a design method of a rigid-flexible coupling rotary stage,which uses the direct drive technology to achieve singlestage drive,and connects the shaft and the rotation through flexible hinges.The friction acts on the rotating shaft,the driving torque and the detection element are installed on the rotating worktable.The friction disturbance is converted into elastic deformation disturbance,which reduces the disturbance bandwidth.At the same time,the active disturbance rejection control（ADRC）can be used to estimate and compensate the error caused by manufacturing error and nonlinearity,which effectively overcomes the effect of friction on the positioning accuracy of the rotary stage.First of all,this thesis introduces the research background and significance of the rotary stage,studies the development status of the rotary stage and related control methods,summarizes the technical difficulties of the existing rotary stage,analyzes how to break through the technical difficulties of the existing rotary stage,and proposes the rigid-flexible coupling rotary stage design in this thesis.Secondly,based on the successful application of rigid-flexible coupling idea on linear stage in our laboratory,the scheme design of rigid-flexible coupled rotary stage is proposed,and the structure design of rigid-flexible coupled rotary stage is carried out through Solidworks3 D modeling software,the working principle of important components is clarified and make a selection.The beam model is used to calculate the torsional stiffness of the rigid-flexible coupling rotary stage,and the Hyperworks software is used to complete the static analysis and modal analysis of the rigid-flexible coupling rotary stage body,which verifies the correctness of the equivalent model.Then,the dynamic modeling and the design of the control model of the rigid-flexible coupling rotary stage are carried out.On the one hand,the PID control is studied,and the design of the dual feedback control scheme used in the test of the stage is briefly described.On the other hand,the active disturbance rejection control（ADRC）is studied,and the design of the active disturbance rejection controller position control scheme used in dSPACE controller testing.Finally,a physical test system is built to test the positioning accuracy and tracking accuracy of the rigid-flexible coupling rotary stage.On the one hand,the double feedback point motion experiment of the rigid-flexible coupling rotary stage is completed by PID control,and the experimental results verify that the stage can achieve higher positioning accuracy.On the other hand,the sine scanning experiment of the rigid-flexible coupling rotary stage is completed by using the active disturbance rejection control,and the experimental results verify that the platform can achieve higher tracking accuracy.