Design Of Rigid-Flexible Coupled Precision Motion Stage Driven By Voice Coil Motor

With the rapid development of IC industry,micro-nano manufacturing,biomedical engineering and precision measurement engineering,higher requirements are put forward for precision motion stage.Combining the advantages of single-stage drive and dual-drive macro-micro stage of traditional positioning stage,a precise motion stage based on rigidflexible coupling design is proposed in this thesis.Structural design and mechanical analysis of the stage is carried out,and step response simulation of the control system is carried out in the simulation software.Finally,the static and dynamic performance of the rigid-flexible coupling stage is studied.Firstly,this paper introduces the research background and significance of precise motion stage,the development status of the structure design and control methods of the existing stage are reviewed at home and abroad,the advantages and disadvantages of the existing motion stage are analyzed,and the standard design scheme are figured out.Secondly,the 3D model and assembly relationship of the rigid-flexible coupling motion stage are built in Creo software,and the working principle and requirements of each component are analyzed to determine its type and material.The equivalent stiffness and natural frequency of the flexible stage are calculated using beam theroy formula.Static and modal analysis of the rigid-flexible coupling stage are carried out by the finite element simulation software to verify the feasibility of the stage structure.Then,the control strategy of the motion stage is analyzed and studied,and the control system model of the motion stage is constructed.Double closed-loop PID control is adopted,in which PI controller is used in current loop and incremental PID controller with feedforward is used in position loop.The dynamic performance of motion stage is tested by step response simulation.Finally,a physical testing system is built to test and the static and dynamic performances of the rigid-flexible coupling motion stage is studied using laser vibrometer and laser interferometer.It's proved that the rigid-flexible coupling precision motion stage designed in this paper can achieve large travel,high speed and high precision positioning motion by testing the stiffness,natural frequency,positioning accuracy,repetitive positioning accuracy and setting time of the motion stage.