Structural Design And Testing Of Two Dimensional Beam Tracking Plate Deformation Mirror

Adaptive optics technology relies on the detection of wavefront distortion,followed by the modification of the mirror to achieve correction and compensation of wavefront distortion.In the initial research stage,adaptive optics technology was directly used in the field of filter imaging.With the continuous development of science and technology,after decades of continuous research,it has been widely used in astronomical telescopes,sensors,laser fields,retinal imaging,biomedical imaging and other fields.IPMC deformation mirror,as a new material,has the advantages of fast response,large deformation,miniaturization and so on,which is favored by researchers.In this paper,the following research and work are mainly carried out in the case of IPMC deformation mirrors with electrostrictive effect as the driving mechanism.（1）Based on the mechanics theory,the boundary conditions of the deformable mirror are analyzed and calculated.The boundary conditions of the two-dimensional beam-slab deformable mirror structure are analogous to the bending of the thin plate under the boundary conditions of free four sides on the elastic foundation.The Liaojin method is used to obtain the approximate deflection expression of the two-dimensional beam-plate deformable mirror under this boundary condition,and then the deflection angle expression is obtained,which provides a basis for realizing the precise deflection control of the beam.（2）Using COMSOL software,the statics simulation of the deformable mirror structure under the boundary conditions was carried out,and the simulation data was obtained.The simulation data was imported into MATLAB,and the simulation data was nonlinearly fitted with the approximate deflection expression.A good fitting effect is obtained,which verifies the accuracy of the approximate expression obtained by the Galerkin method;the linear relationship between the externally applied load and the maximum deflection of the deformable mirror is obtained through MATLAB fitting.（3）Based on the maximum deflection of the deformable mirror and under the condition of not exceeding the allowable stress of the material,the dimensions of the thin plate and cantilever beam of the deformable mirror structure are optimized.First,the length and width of the plate are optimized through MATLAB.The optimal parameter combination under the process conditions,the thickness direction of the thin plate is simulated by COMSOL,and it is concluded that the influence of the thickness change on the deformation is not very large,so the dimension value that is most suitable for the processing conditions is selected;The optimization of the cantilever beam size and the use of the orthogonal test method greatly reduce the number of tests and the difficulty of the test.Thereby,the optimal parameter combination is selected.According to the traditional manufacturing method,the Pd-IPMC material with Nafion as the base film was prepared by electroless plating,which provided conditions for subsequent experiments.It is highly possible to avoid this frequency or to minimize excitation at these frequencies,thereby eliminating or reducing unwanted vibrations of the deformable mirror during operation.（4）An experimental platform was built to conduct experimental research on the deflection of the deformable mirror under the above boundary conditions.Multiple sets of experimental data were obtained through experiments,and then the simulation data were fitted with theoretical expressions.Finally,the experimental data and simulation data were well fitted.The obtained approximate deflection expression verifies the accuracy and authenticity of the approximate deflection expression.Decoupling with fuzzy control,the input of the fuzzy control logic is the deflection angle error and the rate of change of the deflection angle error,and the output is the voltage increment until the output meets the desired requirements.