Design And Driving Control Method Of MEMS Sensor Actuator Integrated Deformable Mirror

With the wide application of deformable mirrors in the optical field and the rise of smart materials,the precision and speed requirements for the dynamic and static control of the optical system and the deformable mirror itself are also increasing.However,there are often redundant measuring instruments in the beam deflection control system,so the need to make a sensor integrated deformable mirror is proposed.For this reason,this paper designs a twoend solid-state based ionic polymer material（IPMC）.The beam sensing implements an integrated deformable mirror solution,which combines sensing and execution,which solves the problem that the beam deflection device requires an additional sensing system,and facilitates better control.The main contents of this article are as follows:Firstly,the driving mechanism and mathematical model of IPMC are introduced,and then the mechanical analysis is carried out for the designed IPMC clamped beam structure at both ends,and the relationship between the deflection,strain and rotation angle and the structural parameters of the deformation mirror of the clamped beam at both ends is determined.Force output tests and COMSOL finite element analysis simulations validate the proposed equivalent beam model.Secondly,an integrated scheme of sensing and execution is designed,and a nonintegrated sensor scheme of pasting strain gauges is adopted.Through mechanical analysis and COMSOL strain simulation diagram,the optimal position of pasting strain gauges is analyzed.And use the calibration experiment to calibrate the relationship between the output voltage of the strain gauge and the maximum deflection value,and realize the purpose of controlling the rotation angle through the measurement principle.Finally,through the study of hysteresis nonlinearity of IPMC material,the nonlinear model predictive control（NMPC）method is used to realize the tracking control of IPMC deformable mirror.Firstly,the hysteresis prediction model of IPMC deformable mirror is established by using RBF neural network and nonlinear autoregressive moving average model（NARMAX）;secondly,the control law is solved by the method based on control increment,and then the gradient descent algorithm is used to solve it.To verify the effectiveness of the proposed modeling and control method,MATLAB simulation experiments are carried out.The results show that the proposed RBF prediction model has satisfactory accuracy,and the absolute error and the mean absolute error of the expected turning angle and the actual turning angle tracked by the NMPC method achieve high accuracy.