| Ultra precision positioning technology is one of the key technologies for the development of national manufacturing industry.It is widely used in military science and technology,aerospace,medical biology and other fields.Therefore,improving ultra precision positioning technology plays a vital role in the development of national high-end equipment manufacturing.Aiming at the problem that the traditional driver is difficult to have both high precision and large stroke characteristics,a large stroke and high precision coaxial integrated macro micro driver is proposed according to the high precision characteristics of giant magnetostrictive driver and the large stroke characteristics of voice coil motor.On this basis,the research on magnetic field,output force and temperature field is increased.The main research contents are as follows:(1)The coaxial integrated macro micro actuator is mainly composed of macro motion represented by voice coil motor and micro motion represented by giant magnetostrictive actuator.On this basis,starting from the structures of giant magnetostrictive rod,micro coil,micro yoke,permanent magnet,macro coil and macro yoke,the overall structure is designed and selected from inside to outside,the structural design scheme of coaxial integrated macro micro actuator is determined,and its working principle is described.(2)In order to improve the output characteristics of coaxial integrated macro micro actuator,based on the numerical theoretical analysis of electromagnetic field,the macro micro magnetic field model and boundary conditions of coaxial integrated macro micro actuator are established.The magnetic field of macro structure and micro structure are simulated by COMSOL software,and the magnetic force line distribution,magnetic field intensity and magnetic field interference rate are obtained,The feasibility of normal operation of the driver under the action of macro and micro cross magnetic field is verified.(3)In order to further optimize the output characteristics of coaxial integrated macro micro actuator,the micro structure and macro structure are optimized.In view of the low magnetic field intensity and uniformity of the fretting structure,the size of the magnetic block and the relative permeability of the yoke are optimized,and the optimal size and parameters are obtained.Aiming at the fluctuation degree of the macro force of the macro structure,the dimensions of the permanent magnet,coil and air gap are improved and optimized,and the optimal dimensions of the permanent magnet,coil and air gap of the macro part are obtained by orthogonal test.After the structure optimization,each part of the macro micro driver is in the best output state.(4)Considering the influence of hysteresis loss,coil loss and heat generated by eddy current loss on the output performance of macro micro actuator under high frequency driving,the temperature characteristics of coaxial integrated macro micro actuator are studied.The temperature field distribution of the driver under high frequency current is studied,and the variation law of the internal temperature rise of the driver under different current and frequency is obtained.In order to reduce the influence of temperature on the driver,a forced water cooling device is added.By adjusting the flow rate of the water cooling coil,the influence of the flow rate on the temperature change of the driver is determined,and the optimal water cooling flow rate is obtained,which provides a guarantee for ensuring the stable output of the driver.Figure[67]Table[11]Reference[72]... |
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