Research On Rf Mems Components Testing System Based On Conductive Adhesive Fixture

As an indispensable part of microwave system,RF Components are widely used in navigation,radar,communication and other fields.The accurate measurement of microwave parameters has become the key link in the development of RF MEMS technology.However,the traditional test method of RF MEMS components is mainly to weld the components to PCB board,which is difficult to weld and easy to destroy the structure of components.In addition,testing of probe stations for radio frequency components and semiconductor systems have problems such as high cost and complex processes.In response to this problem,this paper designs a radio frequency MEMS components test system for conductive adhesive fixtures.Based on the conductive mechanism of anisotropic conductive film(ACF)and the extended array module,the system can realize the solderless multi-channel fast gating test of RF MEMS components similar to QFP package by using the limit function of fixture.This paper will discuss from the following aspects.Firstly,based on the conductive mechanism of anisotropic conductive film(ACF)and combined with the size package of the tested chip,the conductive adhesive fixture was designed,and the HFSS model of ACF interconnection test link was established.The influence of ACF on microwave signal transmission in test link was studied,and its transmission characteristics were verified by simulation.Secondly,the three-dimensional equal scale simulation of SMA connector is carried out by using HFSS simulation software,which provides an important theory support for SMA edge layout of RF components test board.The single-pole four-throw RF test board and single-pole eight-throw RF test board were designed and completed.Based on FPGA hardware control circuit,the strobe control and test of the tested RF components are realized.Based on the principle of multi-port S-parameter measurement,the multi-channel expansion module is designed,and the multi-port S-parameter testing process is described in detail.Thirdly,the display interface design of Lab VIEW upper computer and USB communication program design are completed.By switching different channels on the upper computer interface,the real-time exhibit of VNA test data on the interface can be realized.Finally,the RF MEMS components test platform is built and the corresponding RF test board is replaced to realize the S parameter test of RF MEMS switch at DC-12.5GHz.The experimental results show that the test system can quickly press,fix and test the RF MEMS components,and the reuse of the RF MEMS components will not be affected,which effectively improving the reuse rate of RF MEMS components,and meeting the experimental requirements.