Analysis and design of post-CMOS thermally controlled biosensor array microsystems

A post-CMOS design and fabrication methodology has been investigated for the generation of a microsystem which supports a protein-based biosensor array with thermal control. Implementation of this microsystem design requires a clear understanding of the various layers and their role in CMOS processing technology, especially when the MEMS structures are to be fabricated post-CMOS. In this work, cost-effective post-CMOS design and fabrication methodology has been developed utilizing an experimentally-derived understanding of the various CMOS layers in the AMI C5F/N 0.5mum process available through the MOSIS service. Derived techniques have been applied to the design of thermally isolated biosensor sites for fabrication on MOSIS integrated circuit die. A study of the laws governing heat transfer has been completed for proper integration of temperature control to the designed biosensor sites. Necessary circuitry for the control and design of the thermal system has been designed and is discussed in this work. The results of this thesis work enable the construction of thermally controlled biosensor array microsystems through basic MEMS fabrication steps.