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Researches On The CMOS Biosensor Array For Recording In Vitro Electrophysiological Activities Of Cells

Posted on:2007-09-29Degree:MasterType:Thesis
Country:ChinaCandidate:T ZhuFull Text:PDF
GTID:2178360182470788Subject:Microelectronics and Solid State Electronics
Abstract/Summary:PDF Full Text Request
Biomedical sensor technology is crucial in acquiring physiological and pathological information, and the research in this area has reached the cellular level and molecular level. Recently, Cell-based biosensor is increasingly becoming the hot-point. By coupling the living cell to electrodes and other devices, the essential functional information of cell biology and targeted substance could be detected.Electrogenic cells, such as neural tissues, cardiac muscle cells and adenoid cells, could response the exoteric stimulations ( such as light, electricity and medicine) by generating the action potentials. Detecting the bioelectrical activity of in-vitro electrogenic cells is a basic approach in the research of cell biology, pharmacology and toxicology. At present, extracellular recording is widely accepted as an effective methodology because of its non-invasive nature which allows long-term (up to several months) monitoring and stimulating the electrophysiological activity. Further developments have been achieved since the CMOS (complementary metal oxide silicon) technology is applied to the field of extracellular recording. By virtue of advanced CMOS process, high-density sensor array could be fabricated and the quality of the sensor could be improved by integrating multi-functional circuits within each sensor cell. Therefore, this thesis focuses on the design of CMOS-based biosensor for detecting and recording bioelectrical activity of in-vitro electrogenic cells.The major contents and contributions of this thesis could be summarized as follows:1. The development of CMOS Cell-based technology is widely researched in this thesis and a plenty of cutting-edged research achievements are reported.2. A new CMOS biosensor chip designed for recording electrophysiological activities of in-vitro cultured cells is reported. It is designed and fabricated in a standard 0.6um CMOS process, consisting of 6×6 active sensor array, analogmultiplexer, output buffers, reference sources and digital controlling circuit. Each sensor cell is 65umx80um in the dimension, including a 15um*15um electrode and a pre-processing circuit which could linearly amplify signals with peak-to-peak values from lOOuV to 25mV. The correlated double sampling circuit is utilized to remove the common-mode noise.3. Post-CMOS processes including electroless gold plating and lift-off technique are utilized to improve the biocompatibility of the electrodes, and special package technique are implemented to enhance the stability of the biosensor in the solution environment.
Keywords/Search Tags:CMOS, Biosensor, Cell-based sensor, Array, Extracellular detection, Electrogenic cells, Bioelectrical activity
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