| Micro-Electro-Mechanical Systems (MEMS) have played an important role in modern microelectronics, thermal, mechanical and hybrid systems. MEMS technology is a very promising means that might have a great impact on almost every corner of the society. Although many design methodology of MEMS already exists, not as much attention was given to the synthesis and optimization of MEMS devices. This thesis focuses on the optimization of MEMS actuators and MEMS tunable comb drive capacitors. The optimization is based on changing device geometry to achieve desired output parameter profile. For example in the design of MEMS tunable comb drive capacitors, the output parameter is the capacitance tuning range. Numerical experiments were performed to show the successful implementation of the optimization method. |
