Alumina waveguide characterization and SPARROW biosensor modeling

Sensors based on evanescent wave techniques have the potential to detect minute change in refractive index arising from surface modifications. The biosensor device architecture evaluated in this work is the SPARROW (Stacked Planar Affinity Regulated Resonant Optical Waveguide) structure. This architecture can operate as a biosensor through the change in the coupled optical power resulted from antigen bonding to the bio-layer. Its stacked film arrangement with no lateral patterning offers a potentially less complex structure for fabrication. This thesis describes the process developed to optically characterize the alumina waveguides of the SPARROW device and investigates waveguide film quality as a function of fabrication parameters. Parameters include e-beam deposition drive current and oxygen flow rate. Losses of 1-3 dB/cm have been measured for usable guiding films using the scattered power measurement technique. Microfluidic channel hybrid integration with the SPARROW device and flow cell experiments are discussed. Coupled power and coupling length variation with top waveguide thickness and index is also evaluated and discussed.