| In the new century,with developing need for living level of common people and science devices,current sensors and integrated detecting arrays can’t meet the newest requirement of society and research nowadays.In this background,design,development and research of sensors on better sensitivity,more integrated and more portable is a task of priority.Sensors based on Surface Plasma Resonance effect have been highly regarded recent year for its advantages such as high sensitivity,simplicity and label-free.SPR sensors have been widely used in biochemistry,medicine and other areas.Compared with traditional sensors they have relatively higher performance and lower production prices.As the development of photonics sensors with small sizes in higher ability will become a trend but most SPR sensors now are based on prism design and are always large.At the same time due to differences between traditional semi-conductor rocessing and lab-fabricated sensors,it is still very hard to use traditional semiconductor process on lab-designed sensors.It is a hot issue that how to combine the traditional processing with the newest integrated opto-electronics design.We proposed a novel waveguide sensor based on SPR effect on SOI,taking the prism structure onto the SOI waveguide to realize the integrated design.Based on cooperation with Hangzhou Silan Integrated Circuits Co.,Ltd,we have fabricated this sensor by taking advantage of traditional semi-conductor process,optimized the lithography mask designn and the fabrication process and tested the performance of this sensor,and provided several solutions to using traditional process of semi-conductor on manufacturing the newest opto-electronics designed devices. |
