| The nonlinear response of an electrostatically actuated micro/nano-resonator is investigated. The resonator is parametrically actuated using an electrostatic force with a first order fringe correction. Viscous damping and the Casimir effect are included. The resonator is studied using the Method of Multiple Scales in a direct approach of the problem and then compared numerically using a Reduced Order Model based on the application of a Galerkin procedure. In addition to primary resonance (o0), parametric resonances are found at half (1/2o0), twice (2o 0), and three-halves ( 32 o0) natural frequency. The frequency response is investigated for excitations near primary and near half primary natural frequency. Results for a uniform capacitive resonator are provided at micro and nano scales. |
