The Design Methods Study Of Surface Acoustic Wave Resonator Based On AlN Piezoelectric Film

Surface Acoustic Wave Resonator is a kind of signal processing device,its main function is to choose specific frequency signal,reach the role of signal filtering.Surface acoustic wave resonator has a widely range of applications,involving mobile communications,aerospace,military equipment,radar,smart household and broadcasting and television,and other fields,especially in the application of modern communications.With the trend of high frequency and miniaturization of the communication technology,the requirement of surface acoustic wave resonator is becoming more and more high,so it seems to be necessary to study surface acoustic wave resonator.This paper is mainly about the design of the Surface Acoustic Wave Resonator based on AlN piezoelectric film.Starting from the research of the IDT(Interdigital Transducer),on the basic of the IDT modified delta function model.I have designed the single-ended trapezoidal surface acoustic wave resonator,single-ended triangle surface acoustic wave resonator and single-ended circular surface acoustic wave resonator.I have introduced the study background and significance at first,and then have a simply introduction of surface acoustic wave technology and the subject of the study status at domestic and overseas.Then with quartz crystal resonator and piezoelectric ceramic resonator as a example to make a brief analysis from its working principle and performance characteristics,comparing the performance of the resonators,and analyze the basic principle of surface acoustic wave resonator.Then analyzed the basic structure of surface acoustic wave resonator,and mainly analyzed the core of the surface acoustic wave resonator devices-IDT,then introduced the working principle of the IDT and the relationship between theparameters.Analysis of the surface acoustic wave transmission carrier-piezoelectric materials,simply introduced the characteristics of several common piezoelectric material,mainly introduced this topic choice of aluminum nitride piezoelectric thin film,and then the measure parameters to judge the performance of surface acoustic wave resonator is given.And then gives the modeling method of surface acoustic wave resonator and the mathematical model,based on the modified delta function model to design the mathematical modeling of the three kinds of surface acoustic wave resonator,simulation analysis with MATLAB.Finally,summarized the full text,the next step work plan and suggestions for improvement are put forward.