Study On Leveling Of High-viscous Membrane Utilizing Polarized Electrostatic Force

Micro-liquid film with thickness of micron to 100 microns has been widely used in micro-nano manufacturing,electronic packaging,screen printing and other fields.At present,centrifugal spin coating is the main way to obtain microliquid films.However,when the apparent viscosity of the liquid film exceeds 1 Pa·s,it is difficult to directly obtain a liquid film with high flatness under the influence of liquid additives,base-liquid adhesion,viscous force and initial droplet position.However,if manual/semi-automatic scraping is used for secondary repair,there will be problems such as low efficiency,poor consistency and easy pollution,which will affect the subsequent manufacturing process and the final device performance.Therefore,it is urgent to develop the micro-liquid film leveling technology.This text,the high viscose used in micro-bonding process is selected as the object,and the leveling method of high mucus film based on polarization electrostatic force is studied.The main work is as follows:A theoretical model of electric-liquid coupling was established to describe the flow of liquid film under electric field,combined with the strategies of free interface tracking and adaptive mesh refinement,the multi-physics field coupling finite element calculation software COMSOL was used to analyze the mechanism of the electric field force on the liquid film,and the relationship between the applied voltage,the distance between the liquid film and the electrode and the electric field force,as well as the influence on the liquid film flow.Take cartesian coordinate precision robot as the base platform,trace high viscosity adhesive liquid leveling experiment device was set up.The experimental device is mainly composed of electrode structure module,rubber carrier platform module and film thickness scanning measurement module,Under the environment of LABVIEW software,for liquid film measurement requirements,the robot scanning program,laser triangulation sensor data automatic processing program and electric field control program were developed,and the flatness measurement and electric leveling of liquid film could be realized by using the experimental device.With high viscose as the object,the leveling experiment of centrifugal liquid film was carried out with the above device.Under the MATLAB software environment,a surface fitting program was written,and different fitting methods were compared.The difference between the mean value of the peak and the mean value of the trough of the fitting surface was used as the measurement of the flatness of the rubber surface.Through the analysis of the experimental results,the design group experiment obtained the influence law of the voltage between electrodes,the distance between electrodes and other factors on the flatness of the film,The feasibility of the film leveling method based on the principle of electrohydraulic dynamics was verified.This method is simple to implement,avoids the pollution problem of contact leveling,and provides a measurable evaluation standard,which provides a new idea for realizing the leveling of high mucus membrane.