| The demand for flow detection is more and more urgent with the development and progress of science and technology in recent years.As a new sensor field using MEMS technology,micro flow sensor has more advantages than traditional flow detection equipment in many aspects.In this paper,a new type of two-dimensional capacitive micro flow sensor with high sensitivity is proposed by using the flexure hinge structure.A new feasible idea can be put forward in the field of development and application of micro flow sensor.In this paper,a new two-dimensional capacitive non-thermal micro flow sensor with high sensitivity is proposed,which include a novel annular-elliptical-notch flexure hinge to improve the sensitivity of flexure hinge sensing pole.The flexure hinge sensing pole is used to be the sensing element which can be tilted under the flow rates.Then,a double-deck annular capacitor array structure is installed around the flexure hinge sensing pole to reflect the direction change.Correspondingly,according to the model of the flow sensor,the analytic formula is derived,and the deflection angle formula and the output formula of the ring capacitance of the main component flow sensor are established respectively.A simulation model is established by using COMSOL,and its working environment is simulated to analyze the feasibility of the structure.Some related parameters which can enhanced the sensitivity of the flow sensor is analyzed.By comparing the analytic formula with the simulation results,the possible causes of the errors are analyzed and the improvement suggestions are put forward.This capacitive micro flow sensor can detect air flow speeds ranging from zero to1m/s with a sensitivity of 1.53665×10-9 uF/uN and flow direction with 360 degree.And with its high sensitivity,great dynamic responsibility and small zero drift on temperature,the flow sensor can be applied in coupling physical fields. |
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