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Keyword [Micro flow sensor]
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1. Research On The Front-Sided Silicon Bulk Micromachined Micro Flow-Sensor Based On Differential Pressure Sensing Principle
2. Study On Micro Flow Sensor System And Its Applications
3. Research On High Sensitivity Flexible Hinge Microflow Sensor Based On Double-Layer Ring Capacitor Array
4. Fabrication and characterization of a pulsed MEMS-based micro flow sensor for microfluidic application
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