Research On Engineering Design Of Air-supported And Transmission System For Large Glass Substrate

With the rapid development of LCD(Liquid Crystal Display)technology to highdefinition and ultra-thin,the defect detection requirements of LCD glass substrate are more strict;In order to reduce the cost,the size of single glass substrate in the production process is also increasing.The traditional contact support and transmission technology equipment has been unable to meet the requirements of high-generation glass substrate production,air support technology has become an inevitable choice for glass substrate support and transmission.In this paper,supported by the Major Scientific Equipment Development Special Projects:' Development and Application of Flat Screens Automatic Optical Inspection Equipment',The following research work was carried out on the engineering design theory of glass substrate air-supported and transmission system: According to the characteristics of the glass substrate air-supported and transmission system,a simplified mathematical model is established to studied respectively the pressure and flow distribution of the gas film,air cavity,and throttle of the air floatation transmission system which including positive and negative pressure gas sources,and obtained the pressure and flow coefficient of the entire system using the principle of impedance;The pressure calculation formula and flow calculation formula of the air floatation system under two throttle modes were derived by studying the characteristics of small orifice restrictor and capillary restrictor;through researching the stability of the glass substrate air-supporting and transmission system,the criteria for stability of air-supported system is given.On the basis of theoretical research,the simulation and comparison of the two positive and negative pressure hole arrangement model parameters that are more suitable for engineering applications are carried out;Completed the parameter design of the air-supported and transmission system of the LCD screen automatic optical detection instrument,and an engineering prototype was developed,then experiments were carried out on the developed engineering prototype.The experimental results showed that the main performance indexes of the air-floating system of the prototype have reached the requirements of the mission statement.The research results of this paper have universal reference value for the design of the airsupported and transmission system of open thin plate parts.