The Robust Design Research On MEMS Device

MEMS devices have the advantages of small size, light weight, high sensitivity, low energy consumption. So it is widely used in aerospace, automotive electronics, military, medical equipment and other important areas. However, with the in-depth study of MEMS systems, it can be found that there are a lot of problems in the MEMS system, which makes the performance of MEMS devices are affected. Thus, the application of robust design methods in MEMS, and the MEMS device is not sensitive to these factors and has robustness.In this paper, studied the existing optimal design method, such as a gradient method, conjugate gradient method, genetic algorithm and so on. These optimization algorithms have been well applied in the traditional mechanical systems and continues to this day. But these optimization algorithms have their own shortcomings. For example, in general, the gradient method is very easy to fall within the scope of local search and can not get the optimal solution in the overall situation; GA just infinite iterative process. These optimization algorithms are not formed a complete mathematical model with expressions, so there is a certain variation in the accuracy of the calculation. Because of the large difference between the MEMS system and the traditional mechanical system, these optimization is no longer well suited for MEMS systems. Due to the characteristic size of MEMS in micron or nanometer scale, it is easy to produce scale effect, surface effect and other issues in MEMS system. The surface effect is caused by the scale effect, and there is a scale effect prone to adhesion, friction, wear and other issues. Because of these problems, so the robust design method which is suitable for MEMS devices is of great practical significance.In the analysis of the noise factors that exist in the MEMS system, considering these factors in the optimization design method, the MEMS device is robust to the noise factors. In this paper, analyzes the stochastic model, tolerance model, fuzzy models robust design methods, and the influence of design variables and noise factors on MEMS devices is considered.In this paper. Taking the double island type micro pressure sensor elastic element and the resonant pressure sensor as an example, based on the robust design method of stochastic model, the noise factors that affect the micro sensor are fully considered. Robust design by stochastic model program. Modeling process to establish the sensitivity of the objective function and constraints, finally comes to the conclusion that the results of robust design, the results can be seen in the objective function is robust to noise factors and micro-sensor structure has been optimized, the resonant micro pressure sensor performance is improved.