Hardware In The Loop Simulation And Test Of Precision Motion Platform

Precision motion of hardware in the loop simulation and test platform is a virtual real-time simulation test platform.It is not only used in the precision drive and positioning technology industry,but also in the fields of ultra-precision processing,precision measurement,precision optics,modern medical and aerospace have a wide range of applications.In this thesis,the modeling of nanoscale/micron precision moving objects is applied,and the algorithm verification is carried out on the modeling objects.To achieve the purpose of building the 1-DoF precision motion control system and checking the logical relationship,as well as predicting and feedback the fault of the movement process in the real-time operation process.Firstly,the appropriate nanoscale/micron precision motion modeling object is selected.In this thesis,the piezoelectric actuator is developed according to the principle of inchworm motion and parasitic inertia motion.It is the core component of high precision drive platform and a new linear stepping motor.In the thesis,the piezoelectric actuator is first transformed into a mathematical model and the equation of the relation between the input variable voltage and the output displacement function is established.Simulink tool was used to model the controlled object,and the displacement accuracy of the algebraic equation of motion in the real-time system was verified by changing the value of the input voltage variable.Secondly,the drive and control system of 1-DoF moving platform is built.The driving signal is analyzed in the driving system,and the driving signal equation model is established,and the driving signal is controllable in voltage and frequency.In order to facilitate the experimental requirements of multiple measurements,a reversing module was built to make the piezoelectric actuator directional during operation.The 1-DoF motion control system mainly adopts the PID module to conduct closed-loop control on the one-dimensional motion platform.The error between the actual motion trajectory and the trajectory of the ideal equation is used to correct the value of the input variable,so as to achieve the goal of trajectory tracking and trajectory error reduction,and then a complete in-loop control system is formed.Finally,the hardware is built on the loop simulation platform for verification.The piezoelectric actuator was driven by RCPTB.The impedance analysis and verification of the analog circuit of the driver capacitive amplifier are carried out.A laser interferometer with high resolution is used to measure the actual displacement of the piezoelectric actuator,and then the actual displacement data is fed back to the closed-loop system which is modeled in the rapid control prototype development tool.In order to verify the repeatability of piezoelectric actuator,an integrated driving amplifier based on FPGA is designed.The upper computer software and hardware developed by the way of PCIe bus communication to complete a variety of mode switching and get different motion trajectory.In the whole experiment,the RCPTB tool was applied to the ring simulation and test platform to drive the piezoelectric actuator under high voltage and high frequency.In the laser interferometer acquisition equipment with accuracy of 1nm resolution,the motion test of piezoelectric actuator with per step displacement of 50.7nm was realized.