Research And Implementation Of Precision Positioning Technology Based On Piezoelectric Ceramics

The dissertation derives from the project"Piezoelectric platform for precision positioning using charge-feedback and nonlinear control method"supported by National Natural Science Foundation of China (authorized No. 10376043).The principle on the displacement amplifying of the Cymbal piezoelectric actuator and the designing of the precision positioning instrument of the Cymbal piezoelectric actuator has been introduced in this paper. Experimental data from tests showed that the output range of a Cymbal piezoelectric actuator is 6 times of a stack actuator with the same layers of the stack under the same voltage.Experimental data from tests showed that there is significant hysteresis between the voltage applied to the actuator and the actuator output. Experimental data from tests also showed there is significantly more linear and less hysteresis by using charge feedback in this paper. To avoid the actuator, a capacitor load being charged up by the drift current of the amplifier, a secondary feedback from the output of the amplifier has been used and expected result has been gotten. This dissertation also introduced the two dimensional micro positioning platform with piezoelectric actuators using charge feedback include piezoelectric actuator, the mechanical structure, amplifier, precision position sensor, the designing and realization the hardware and software of control system using C8051F021 SCM.