Research On Infrared Detection Sensor Based On Lithium Tantalate Film

Pyroelectric infrared detectors are an important branch of infrared detectors.In recent years,research in the field of infrared detection has focused on the invent of non-refrigerated pyroelectric thin film infrared detectors.In the current research,on the one hand,the goal is to improve the performance of the entire detector by selecting the best materials and designing a better detection structure;on the other hand,it is to reduce costs and improve practicality.For the pyroelectric thin film materials,it is the main subject in applied research to propose a more optimized preparation process,prepare non-refrigerated detection sensitive elements,and improve the working efficiency of sensitive elements.This thesis combines the development of leading-edge room temperature pyroelectric infrared detectors,and conducts research from the design of the sensitive element structure of the detector,the selection of the absorption layer,and the preparation process.In the experiment,a pyroelectric multiple infrared detection array based on lithium tantalate film was designed and prepared,and the near-infrared wavelength room temperature detection of the detector was achieved under the excitation of a pulsed infrared light source.The research results show that the absorption rate of the prepared carbon black infrared absorbing layer exceeds 94%in the near infrared band.Based on this,the noise equivalent power(NEP)of prepared pyroelectric detection array under the direct excitation of a 2200nm light source with 3Hz pulse frequency of has reached 7.46×10-4 W/Hz1/2,and the detection rate has reached 1.34×103 Hz1/2W.It has excellent detection performance and lays the foundation for the research of pyroelectric detectors based on lithium tantalate series materials.