Research On Ceramic-based Sensors Based On Microwave Complementary Split Ring Resonators

As the accelerated development of world aerodynamic technology has triggered countries all over the world to compete for the development of hypersonic aircraft,and the turbine engine as the heart of the aircraft,how to monitor its internal important parameters,is of great significance to the development of aerodynamic technology.Among them,the prediction of the electromagnetic environment inside the turbine engine and the measurement of the blade tip clearance can realize the health monitoring of the internal environment of the turbine engine and the blades,respectively.Therefore,the prediction of the electromagnetic environment inside the turbine engine and the measurement of the blade tip clearance are particularly important.Among the many test devices,microwave ceramic-based devices are widely used in the testing of internal parameters of turbine engines because they are not easily affected by metals and harsh environments.Domestic research on blade tip gap sensors started late,and there are problems such as inability to adapt to harsh environments and large sizes;and there are few electromagnetic characteristic sensors that can simultaneously measure the two parameters of permittivity and permeability for electromagnetic environment prediction.In order to research the above problems,this paper applies the complementary split ring resonator(CSRR)structure and planar transmission line technology to the prepared microwave sensor device.Combining the advantages of microwave technology and metamaterial complementary split ring resonator structure,the principle and test methods of the blade tip clearance sensor and the material electromagnetic characteristic sensors have been explored and studied.The main research work of this paper is summarized as follows:1.An etching structure based on microwave technology that can simultaneously measure the permittivity and permeability is proposed.The structure is derived from a complementary split ring resonator structure,which separates the strongest electric and magnetic fields of the sensor to achieve the purpose of using a sensor to test two parameters at the same time.And the use of ceramic substrate and screen printing technology to make,not only can make the sensor size smaller,but also expected to perform parameter testing and real-time acquisition in a hightemperature test environment.2.A microwave sensor based on Nested-CSRR structure is designed.The sensor is used for structural design,simulation and optimization through HFSS.Simultaneously,the effect of the distance change of the blade on the sensor return loss(S11)parameter amplitude is simulated,which proves that the sensor S11 parameter amplitude increases with the distance.Finally,through experimental tests,when the distance is below 3mm,the sensitivity of the sensor is 24.39 dB / mm,when the distance is above 3mm,the sensitivity is 8.86 dB / mm.3.A microwave sensor based on CSRR derivative structure is designed for the measurement of permittivity and permeability of materials.A test method for measuring the electromagnetic properties of materials that can simultaneously measure the permittivity and permeability with a single sensor is explored.Through the HFSS simulation structure,electromagnetic field distribution characteristics,and then find the strongest electric field,the magnetic field is almost zero area and the strongest magnetic field,the electric field is almost zero area.Put the material to be measured in these two different locations to measure the permittivity and permeability of the material respectively.This method can reduce the mutual interference of the permittivity and permeability on the response signal during the measurement process,and finally get The maximum measurement error is 3%.