Research On Matrix Grating Scale Signal Processing And Compensation Technology

With the development of technology and industrial automation,high-precision,high-resolution raster position measurement plays an important role in achieving automation equipment in position and speed.Whether in large equipment or in the microelectronics industry,high resolution and large scale encoder sensors always play an important role in industrial automation.The scale displacement sensor enables position and speed feedback of the electronics manufacturing equipment,ensuring that the device can read position and speed information in real time and work properly.At present,the grating signal has been processed and subdivided practically and effectively at home and abroad,forming a certain system and research method,but the scheme and signal processing are mixed.This paper attempts to continue research on the grating signal processing and compensation technology on the basis of predecessors.This paper introduces the research and application status of grating scale technology at home and abroad,expounds the working principle of matrix grating scale and the formation principle of moiré fringe,analyzes and summarizes the model and research of previous generation of grating signal.The existing models are explored and analyzed,and the error forms,processing methods and error compensation methods of the grating signals are summarized.Based on the existing experience and mathematical model,the processing method of the absolute grating scale signal error model is summarized.The error analysis of the signal after the primary processing is carried out and the error compensation technology is studied.Based on the model establishment,the signal is pre-analyzed and processed by finite response filter(FIR)and discrete Fourier transform(FFT).The state estimation method is used to estimate the frequency of the non-uniform frequency moiré.Re-sampling,and according to the curve fitting method,the error analysis is carried out,the data error is verified by online simulation verification and analysis,and the hardware environment is built and simulated,and the experimental data is collected and analyzed.The experimental results show that the Fourier transform and filter can identify and suppress high-frequency signals and reduce signal interference.By estimating and reconstructing the frequency of non-uniform sampling signals,the data processing and processing difficulty of signal processing are reduced.After the model is verified,the method has a good compensation effect on the moire fringe signal error.Through the analysis of the experimental data,the method can realize the real-time processing and error compensation of a certain grating scale signal,from the original error of 1.77?m to the maximum of 0.35?m,which ensures the measurement accuracy and reliability of the grating scale.