| Measuring technology is the foundation for manufacturing. Unfortunately, thedevelopment of this technology is limited by many factors, such as the high-precisionlength measurement method is one of the bottle-neck problems. Nanometermeasurement is one of the important branch and key basis of nano-science. It isnecessary to develop a new metrological method with high-precision, highanti-interfere ability and wide measurement range. This paper intruduces themetrological grating measurement system which has large displacement andnanoscale measurement accuracy. The basic principle and key technology ofmetro-grating sensor which has nano-measurement precision is studied.Our research interest are focused on the following topics: Firstly, in order todevelop metrological grating with nano measurement precision, the formationmechanism of the two times Moiréfringe are reaseached based on metrologicalgrating structure. The measurement principle of nanomeasurement precision grating isanalyzed based on two times Moiréfringe. The simulated calculation results show thatits resolution can achieve 5.40×10-10m. The measurement precision can achievenanometer which is approved by the electronic division technique too. Secondly, theeffects on the two times Moiréfringe are discussed, when the indicator grating andscales grating is not parallel. Finally, this paper analyze the optical system and theoptical constructions of the grating sensors. |
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