Research On Error Compensation Technique Of Moiré Signal

Grating sensor has been widely used in the field of precision machine tools and integrated manufacturing because of its high precision and high resolution.The measurement accuracy depends on the subdivision precision of moiré fringe signal,and the subdivision precision depends on the quality of moiré fringe signal,so it is important to develop research on Compensation Technology of moiré fringe signal error to ensure measurement accuracy,grating sensor resolution and its adaptability in harsh conditions.In practical applications,due to engraving error,grating installation position and other factors,the moiré signals tend to existence signal distortion.In this paper,based on the analysis of the characteristics of the moire signal,establishes the mathematical model of Moire Signal DC error,amplitude error and quadrature error,and corresponding to mathematical model study on the error compensation algorithm,and through the FPGA circuit platform,realized and verified the various error compensation algorithm.Finally,completed the comprehensive compensation of Moire Signal error.The main research contents include:1.Error model establishment of moiré signals : analyzed the characteristics of the moiré signal,according to the DC error,the amplitude error and the quadrature error of the signal,establish the mathematical model of the signal error,analyzed the influence of various error on the subdivision.2.Development on moiré signals error compensation circuit: Based on the short period error model,according to the DC error,the amplitude error and the quadrature error developed the error detection and compensation algorithm.Through the FPGA circuit platform,realized the various signal error compensation.Integrated every single error compensation module,to realize the comprehensive compensation of grating moire signal error.3.Test of the error compensation effect:Test the detection and compensation effect of the single error compensation algorithm,verify the effectiveness of the single error compensation algorithm;Test the compensation effect of comprehensive compensation module,verify various error index of ignal after the comprehensive compensation,explain the effectiveness of the algorithm for the comprehensive compensation of signal error.In this dissertation,the grating moiré signal error compensation technology is studied,the research results not only accumulated the technical means for improving the quality of the grating moiré signals,but also has practical significance and engineering application value on the signal subdivision and the improvement of measurement precision.