Metallic Multi-ring Disk Resonator Gyroscope Simulation And Its Microfabrication Technology

Gyroscope is a kind of inertial sensor which is used to measure the angular or angular rate of the rotating object.Developing from the earliest gyroscope,Microelectro Mechanical System(MEMS)gyroscopes are widely used in fields such as the spaceflight,military and consumer electronics because of its small volume,light weight,low cost and low power consumption.Due to its good symmetry and flat structure,the multi-ring disk resonator micro-gyroscope has obtained great breakthrough and caught a lot of attentions in recent years.The basic structure and working principle of the multi-ring disk resonator gyroscope are studied,and a kind of metallic multi-ring disk resonator gyroscope(MDRG)is proposed in this paper.The key technology of fabricating MDRG on the glass substrate is studied in this paper,and the process of nickel multi-ring disk resonator gyroscope under low temperature with low cost is designed and realized.In this paper,based on the research of multi-ring disk resonator gyroscope,the structure of MDRG is designed,and the finite element method is used to analyze the vibration characteristics of the metal vibrator.The fabrication process of the MDRG were designed.The metal vibrator and the sacrificial layer were fabricated by electroplating,so the whole process can be done under lower temperature environment.At last,the closed-loop digital detection and control circuit is designed by using LabView.The simulation results and the fabrication process of the gyro chip verify the feasibility of the MDRG and the key technologies used in it.