The Application Of Hardware In The Loop Simulation System In The Wafer Transport Unit Of Lithography Equipment

As Moore's law continues,there was an exponential increase in the complexity of lithography equipment research and development.The scroll rate of electronic equipment,however,require lithography to shorten the development cycle.As the "Cash Machine" in the field of integrated circuit,Customers on the equipment reliability,fault location and restore of the lithography have a higher requirement.Therefore,the hardware in the loop(HIL)simulation technology is used in modern lithography equipment development process.As an important unit lithography equipment,Wafer Handing Unit(WH)transfers wafers with high precision and high efficiency from box sent to the wafer stage.The simulation system of lithography HIL can be viewed as a virtual lithography machine,it simulates the hardware devices which are control by the lithography software system,and it provides for the integration of hardware environment which can be used when we debug or test the lithography software system.In general,the lithography HIL simulation system have played an important role as follows:At first,when we do not have lithography hardware equipment,we can use the system for lithography software debugging work,especially for debugging the hardware real-time control layer.It shortens the lithography machine product development cycle because it saves precious time of integrating lithography equipment software and hardware.The second,on the one hand,we can use the lithography HIL simulation system to make up the test of hardware real-time control layer which traditional test of lithography equipment software has not covered,so it enhance the software test coverage.On the other hand,it can test the destructive scenes which we cannot test in the real lithography equipment,so it improves the equipment safety in the process of software testing.This paper completed the whole simulation of wafer pre-alignment function,which canverity the function of wafer pre-alignment maximum without the lithography equipment.On the one hand,the failed pre-alignment scenes which due to process adaptability problems in the client company can be simulated easily by adjusting the simulation data in the lithography equipment company,so it laid a foundation for the faster and better lithography equipment software.On the other hand,this paper realized the simulation of uniaxial motion control system which provides the reference for other uniaxial motion control system simulation of the lithography HIL simulation system,so it provides an important function for the whole lithography HIL simulation system.In the first chapter of this paper,the research status of lithography and the wafer pre-alignment is introduced.In the second chapter,the software system,the Wafer Handling system and the application of hardware in the loop simulation system are introduced.In the third chapter,the requirement of the hardware in the loop of WH and pre-alignment are analyzed.The simulation of wafer pre-alignment function includes pre-alignment motion control simulation and image acquisition algorithm simulation.The motion control simulation includes three parts,the actuator simulation,the mechanical simulation and the grating sensor simulation.In the fourth chapter,the framework of WH hardware loop is designed,and the simulation model of actuator simulation,mechanical simulation,sensor simulation and image acquisition algorithm are analyzed and designed in detail.In the fifth chapter,the system which is introduced in the above chapters is implemented and deployed.In the sixth chapter,the correctness and precision of the system are verified by integration testing.In the seventh chapter,the design and implementation of the system are summarized,and the expanding direction is planned.