SOI Microring Coupling Modulation And Its Applications

Benefiting from the merits of low power consumption,low cost,compact size and compatibility with CMOS fabrication process,silicon photonics devices have been an essential part of the development of future optical communication technologies.As key components of the EO/OE convention in the optical transmission networks,the performance of the modulator will affect the whole optical communication system.Therefore,it has much academic value and application prospect,and is the research highlight.This thesis focuses on the coupling modulation in a microring resonator.The transfer matrix method was adopted to analyze coupling modulation.It reveals that the coupling modulation behaves unlike the traditional directcavity modulation.A low-voltage single-drive push-pull coupling modulator based on a silicon racetrack resonator with a free-carrier depletion electrode was designed and fabricated.Both static measurement and dynamic modulation experiments were carried out.The 3-dB electrooptic bandwidth was measured to be >30 GHz beyond the limit by the cavity photon lifetime.A 32 Gb/s on-off keying(OOK)modulation was realized under a peak-to-peak drive voltage as low as 0.4 V,and a 28 Gb/s binary phase-shift-keying(BPSK)modulation was realized with a drive voltage of 3 V.The low drive voltage results in low energy consumptions of ~13.3 fJ/bit and ~1.2 pJ/bit for OOK and BPSK modulations,respectively.In microwave photonics,a phase shifter is one of the key devices.Coupling modulation could also be utilized for phase shifting.With coupling tuning of the Mach-Zehnder interferometer(MZI)coupler to change the resonator from under-coupling to over-coupling,the device can realize a ? phase shift on the incoming microwave signal with a frequency up to 25 GHz.The device can also realize 2.5? continuous phase tuning by manipulating the three DC bias voltages applied on the MZI coupler.