Microwave Photonic Phase Shifter Based On Silicon Photonics

As one of the research topics of microwave photonics,microwave photonic phase shifters are mainly used in microwave signal processing,optical phased array radar and intelligent antenna.However,the traditional implementation schemes of microwave photonic phase shifters which rely on the discrete components is limited by the disadvantages of high cost,low integration and poor stability.The silicon photonics technology,supported by the complementary metal oxide semiconductor(CMOS)technology,has the advantages of large bandwidth,low cost,low power consumption and high integration.Applying the silicon optoelectronic technology in the field of microwave photonics,which is a hot research topic in recent years,can realize a large-scale on-chip integration and reduce the cost.This paper mainly studies the microwave photonic phase shifter based on silicon photonics,and proposes a tunable microwave photonic phase shifter with a stable RF power based on a ring resonator and a directional coupler(RR-DC).The main contents of the thesis are as follows:Firstly,we introduced the theoretical analysis and simulation methods of silicon photonic devices and emphatically introduced the elements which are the directional coupler(DC)and Add-Drop microring resonator in the proposed phase shifter.The amplitude-frequency response of these elements are obtained.The third chapter introduces the fabrication process and then introduces two common methods of coupling test,and shows the spectrum of RR-DC device on the vertical coupling platform.In the fourth chapter,a tunable microwave photonic phase shifter with stable RF power is proposed.The theoretical and simulated analysis,the working principle,the experimental verification and the result analysis are alternately introduced.The proposed phase shifter uses an Add-Drop ring resonator to achieve a near 2? phase shift and a directional coupler to introduce constructive interference to achieve a stable RF power.Experimental results show that a 0-5.2-rad phase-shift range with a RF power variation within 0.2 dB for a frequency range from for a 40-GHz signal is achieved.A phase shift up to 4.1 rad over a frequency range from 20 to 40 GHz is also realized.