Study On Concentrating Microlens Arrays For Detectors

In the past 30 years,infrared technology with infrared detectors as the core has been rapidly developed.In addition to the widening of its application fields,its own innovations are also emerging.With the development of MEMS,devices are becoming more and more miniaturized,and in order to improve the resolution and target recognition capability of the system,this requires high sensitivity and high efficiency of light energy utilization.The microlens array is designed to concentrate the light incident on the pixel area into a smaller photosensitive area,which not only improves the utilization of light energy,but also avoids crosstalk between pixels.This paper provides a focusing and micro-lens array preparation and integration scheme for infrared focal plane detectors from the perspective of focusing on the performance of microlens arrays.The detector's fill factor can be increased to improve the performance of the detector.The main work of this paper is:1.In the simulation design,the ZEMAX software is used to design the microlens arrays with different integration methods for specific detectors.The advantages and disadvantages of different integration methods are compared and the integration scheme is determined.Secondly,the super-surface structure was introduced,and the super-planar lens was designed.The FDTD software simulation was carried out to verify the focusing function of the planar structure microlens,which provided a new scheme for integrating the microlens of the detector.2.The preparation process of microlens arrays was studied in detail.The process of step pre-baking and secondary homogenization was improved by photolithography hotmelting method and etching.The corresponding processes were carried out for low-crown high-lithography and high-crown etching.Improvements,clarification of process parameters,preparation of three different specifications of the microlens array.3.The surface topography test of the microlens array was carried out,the spot test system was built,the focused spot image was acquired,and the uniformity of the array spot was analyzed.The performance of the microlens was improved.