The Study On The Polarization And Contact Types Of Piezoelectric Semiconductors

Piezoelectric semiconductor materials,as pecial kind of semiconductor with piezoelectric properties,have been widely used in the manufacturing of intelligent devices.Polarization is a key technology in the fabrication of piezoelectric semiconductor materials,which directly affects their piezoelectric properties.During usage,it is inevitable to contact with metal electrode.The boundary condition depends on the corresponding contact types,which is very important for multi-field analysis of piezoelectric semiconductors.Based on the above two aspects,the main work of this paper is as follows: 1.A polarization experimental devices have been developed to achieve polarization treatment of piezoelectric semiconductor materials.The performance evolution of GaN piezoelectric semiconductor is systematically studied before and after polarizing.It is found that the polarization makes GaN have piezoelectric properties and affecttheir electrical and electrical properties.Polarization significantly improves the conductivity of piezoelectric semiconductors and changes the bending strength.2.According to principle of probe methods,an experimental device is designed to quickly test metal-semiconductor contact type and contact resistance.The contact type of the sintered Ag electrode and GaN is determined by this apparatus.The results show that whether GaN is polarized or not,the contact type is Schottky contact.According to the tested I-V characteristics,the correlation between polarization and electric conductivity of piezoelectric semiconductor was further verified.