Positioning Control Of High Frequency Reciprocating Rotary Swing Arm

The reciprocating swing arm is a key component in microelectronics and semiconductor manufacturing equipment.Its positioning accuracy and rotational speed directly determine equipment accuracy and production efficiency.The resonance of the high-frequency reciprocating swing arm flexible vibration and the input signal of the servo control system affects the reciprocating pendulum.Two main factors of arm positioning accuracy and production efficiency.The main contents of this article are:The research status of chip detection and sorting equipment at home and abroad is analyzed,and the suppression of swing arm in terms of dynamics and control strategy is compared,and the limitations of existing methods in practical applications are pointed out.The workflow of the swing arm and the working time series model are analyzed.The working requirements of the swing arm are put forward.The response of the servo control system is discussed according to the existing experimental platform.By establishing the mathematical model of permanent magnet synchronous motor,the motor vector control mechanism is analyzed in principle,and the comprehensive control model of the rotating swing arm experimental platform is completed.The influence of controller parameters on system performance and the setting of control system parameters are provided.The theoretical guidance basis.In view of the possibility of mechanical vibration during the high-frequency reciprocating rotation positioning of the rotating swing arm,according to the principle of the motion instruction optimization scheme such as the instruction smoothing filter and the flexible design of the speed curve,the advantages and disadvantages of the two schemes are compared and completed.The speed profile of the swivel arm prevents rigid and flexible shocks.Aiming at the situation that the rotating swing arm may resonate during the positioning process,the frequency characteristics of the low-pass filter and the notch filter are eliminated.The filter selection is completed and the filter parameter tuning principle is summarized.Finally,the experimental platform construction and system debugging were carried out.Combined with the model and speed curve of the rotary swing arm positioning control system,according to the control system parameter setting principle,the parameter setting of the rotary swing arm positioning control system was completed,and the motion command optimization and different parameters were adopted.Under the filter comparison experiment,the influence of filter parameters on the positioning time and positioning accuracy of the swing arm is verified.Decreasing the filter time parameter will improve the system response and improve the positioning accuracy of the swing arm.However,if the filter time parameter is too small,the system will vibrate.It is not conducive to shortening the positioning time of the swing arm;verifying the difference of the positioning accuracy of the swing arm when using S-type acceleration and deceleration and linear acceleration/deceleration.The experimental results show that the S-type acceleration and deceleration is used for softening design,the positioning time is 20ms,and the positioning error is±3 " which can improve the positioning accuracy of the swing arm by avoiding the impact,and also improve the positioning speed of the swing arm.