Research On A Piezoelectric Sensing Actuator System Based On The Polarized Sensing

In the gravity compensation and vibration suppression field,we always desire to integrate the sensors and actuators in a limited space and output an accurate displacement to compensate for the deformation or vibration displacement of the components at the same time as sensing the forces.For this reason,from the perspective of theoretical derivation,simulation analysis and experimental demonstration,this paper develops a piezoelectric sensing actuator based on polarimetric sensing and designs a se nsing signal processing circuit to form a complete sensor system.This article takes piezoelectric ceramics and quartz crystals as the research object.Through theoretical analysis,the mathematical and electrical models of piezoelectric ceramics as actuators and quartz crystals as sensors are derived.Meanwhile the overall structure of the package is designed considering the characteristics of miniaturization and anti-interference.Build a finite element analysis model,use static analysis and modal analysis of the structure to determine the external excitation size and frequency range by the ANSYS software,use transient simulation to explore the actuator response to the alternating signal;analyze the whole model of electric field interference,which provides the basis for the model production and optimization.For the output processing circuit of sensing signal is simulated by Multisim software,and explore the influence of the hardware parameters on the signal collection to determine the form of each part of the circuit.In order to verify the correctness of the theoretical and simulation analysis,a prototype of a piezoelectric sensing actuator is made and the circuit board is drawn and then the PCB is made.An experimental platform is designed and built to record and process the experimental signals through the NI acquisition system.The experimental results show that the sensor part has excellent dynamic and static performance,the nonlinear error is 0.2%,the repeatability error is 0.54%,the hysteresis error is 0.4%;when the 10-150 Hz dynamic force is applied to the sensor,the amplitude change rate of the sensor is 1.7%,and the standard 10 N excitation force error is 1%;The hysteresis characteristic of the actuator part is also in line with the theoretical law of 15.3%,and the AC signal can also be good heel;the two core parameters of the sensing system,the feedback resistor Rf and the feedback capacitor Cf,are selected as 1G? and 1000 p F.Under this parameter,the sensing hardware circuit has good high and low frequency characteristics,the minimum accuracy is up to 10-2N,and have the outstanding advantages of small volume,low cost and other outstanding advantages.With the characteristics of low cost,small vol ume and simple operation,the piezoelectric sensor system designed in this paper will have a wide application scene in the fields of active vibration suppression,gravity compensation and high precision platform support.