Research On In-position Detection Technology And Precision Machining Of Micro-structured Dense Arrays

With the widespread use of intelligent electronic devices in daily life,and the rapid development of the light guide plate industry promotes the improvement of the precision machining technology and the optimization and upgrading of precision machine tools.The micro-structure arrays processed on the core of the light guide plate belongs to ultraprecision machining.The subject revolves around the processing and in-position detection of the light guide plate core.Precision machining and process improvement of microstructure arrays,high precision in-situ detection system with a precision of 2 ?m,errors analysis and compensations in the processing are mainly studied.The research of this issue is of great significance in the context of intelligence and modern precision manufacturing.The adjustment process is complicated and the accuracy is not high of the Y axis adjustment platform,an automatical adjustment platform for loading and unloading automatical and adjusting the horizontal slope of the mold core is proposed.Through the flatness of measurement and improvement research of the mold core,the adjustment accuracy of the horizontal slope of the mold core is improved.A simple and convenient method of setting tool is summarized for the cumbersome and complex situations of macro and micro setting tool.Mold steel,7075 aluminum alloy and brass with high hardness and ideal wear resistance were selected as the material of cores.Coupled machining experiments of diamond cutters and different material cores were performed on a precision machine tool of micro-structured dense arrays to obtain micro-structure arrays of different dot types,including circular equidistant,circular misalignment and circular tangent.The white light interferometer was used to analyze the processing quality and accuracy of the threedimensional topography of the microstructure,and the quality and accuracy of the microstructure arrays processed on the mold core of the mold steel are better than the 7075 aluminum alloy material core.The microstructure of the brass core does not have a higher quality and a better precision.By analyzing precision machining and the functions requirements of in-position detection,the hardware platform for in-position detection system was built and software was implemented.On account of the dense features of the processed micro-structure dots and the small field of view of the in-position detection system,the grating ruler with a precision of 0.12 ?m was used as the calibration to obtain the pixel equivalent value that ensures the accuracy of the in-position detection system with high accuracy.A simple and easy-to-use high-precision in-position detection system was designed with the joint programming of Halcon and MFC.For the obvious Gaussian noise in the microstructure array image,the linear Gaussian filtering and noise reduction process ed is used to effectively suppress the Gaussian noise and filter the image forward and backward.Otsu's automatic threshold segmentation algorithm is used,to achieve high-efficiency and high-precision threshold segmentation of different material cores,different light intensities,and different micro-array spot types.The Canny operator edge coarse positioning and quadratic curve fitting sub-pixel edge detection were used,and the complete micro-structure array edge contour was extracted.The high-precision white light interferometer is used to measure the depth of the micro-structure micro-dot,and according to the Pythagorean Theorem and the spherical radius of the tool to calculate the diameter of micro-structure micro-dots,and compared with the measured value of the in-position detection system,it has been verified that the measurement system accuracy meets the design requirement.The errors existing in the processing of dense arrays of microstructures has been analyzed compensated.Experiments of the displacement output of piezoelectric ceramics at different given voltages and the actual amplification factor of piezoelectric actuators are conducted.The least square method is used to fit the displacement output curve of the piezoelectric ceramic in the step-up process to compensate the nonlinear displacement output of the piezoelectric ceramic.Through machining experiments,it is verified that the nonlinear compensation of piezoelectric ceramics can improve the accuracy of micro-diameter accuracy.Laser interferometer is used to measure the positioning accuracy of the guide rail and pitch compensation principle of IMAC 400 controller to compensate the positioning accuracy of the machine tool guide rail.After compensation,the guide rail positioning accuracy is higher so the precision of micro-structure array micro-point center-to-center distance is guaranteed.