Research On The Testing Method Of Large Distance Optical Axis Parallelism

With the advancement of optoelectronic technology and the increasing demand,devices incorporating visible light detector,infrared light detector,and laser detector have been widely used.These devices integrate a variety of photoelectric sensors,and the spectral range covers the visible to infrared wavelengths.The structure distribution of various optical systems is also becoming more and more complex.Optical axis parallelism is a key issue that determines the performance of multi-optical systems for integrated optoelectronic devices.Optical axis parallelism testing for optoelectronic devices is also critical.The new type of photoelectric equipment emerges in endlessly.The distribution of different optical systems of the photoelectric equipment is large and distant,which greatly increases the difficulty of detecting the parallelism of the optical axis.This paper research on the parallelism detection of large distance optical axis and design a detection system which can test the parallelism between large distance optical axes.According to the design results of the optical system and detection requirements,a testing system was proposed.In order to ensure the accuracy of the testing system,the principle of the introduced high-accuracy beam parallel translation system is analyzed,and the accuracy analysis and parameters of the entire system are completed.The large distance optical axis parallelism testing system realize the parallel detection of the multispectral optical axis.By introducing a high-precision beam translation system,the detection aperture can reach 1200 mm,and the accuracy can be guaranteed from-40 ℃ to 50℃.After the error analysis and parameter detection for the detection system,the accuracy of the parallelism between the visible,infrared,and laser optical axes is 12′′,and the error of the high-precision beam parallel translation system is less than 16.5′′.The error of the inspection system is 32′′,and the detection accuracy is less than 40′′ which is required.