Research On The Angle Measurement Technology Of Multi-Image Point Compensation Method Based On Array Lens Molding Of Shackhartmann Sensor

Based on the principle of measuring the slope characteristic of the wavefront by ShackHartmann sensor,the structure form between the array lens and the sensor is changed so that it can measure the angle of incident light.The principle can be applied to many relative position measurement applications such as flatness and straightness.The array lens in the Shack-Hartmann sensor has the advantage of being able to simultaneously obtain the associated multiple spot information.Based on this characteristic,this paper constructs a theoretical model of the incident angle measurement of light based on the array lens,and studies the position information error processing and data compensation method obtained by multiple spots;In combination with the array lens processing technology,a hexagonal array lens was designed and samples were processed for experiments;At the same time,the parameter characteristics of the CCD device used to obtain the spot information are also analyzed.The GSENSE2020 s CCD is used to obtain the spot image of the incident laser beam,and a series of image processing algorithms such as Gaussian filtering,iterative thresholding,linear interpolation and first-order centroid algorithm are applied to the image processing(Speckle centroid detection resolution up to 0.1 ?m).According to the established mathematical model and image processing method,the relative angle measurement experiment of array lens and CCD receiving surface was carried out.According to the established mathematical model and image processing method,the relative angle measurement experiment of array lens and CCD receiving surface was carried out.Use an auto-collimator with an accuracy of 0.5? as the standard volume,and use a high-precision turntable to build an experimental system;And through multiple sets of incident angle standard increments,the error compensation information of the relative angle between the array lens and the CCD receiving surface is input,and the least squares fitting is performed with a linear function to obtain the optimal compensation amount of the system;The function relationship between the incident angle and the distance between the spots was constructed to verify the correctness of the measurement principle and the reasonableness of the compensation method.