Study On The Fabrication Of New Bulk Acoustic Waves Chip

Due to the rapid development of MicroElectrical Mechanical System(MEMS),the research of microfluidic technology has been widely concerned.In the last three decades,micromachining-based microfluidic chips have shown promising applications in physics,chemistry,biology and other fields.Because of its miniaturization and ease of integration,microfluidic chip enables the detection,control and analysis of various functions on a coin-sized chip.Compared with traditional technology,this technique,known as Lab-on-a-chip,has greatly reduced the size of the device,reduced the amount of samples and reduced the cost of the experiment.Therefore,it is very popular in the fields of biological analysis and detection,chemical synthesis and drug delivery..Acoustic microfluidic chip has attracted wide attention and has become one of the most important research due to its advantages of small size,high sensitivity,high biocompatibility,high integration and no contact.In addition,our bulk acoustic waves chip has shown a good application prospect in the field of particle control due to the advantages of large flux preparation technology,but it is difficult to fabricate.In this paper,we mainly use micromachining technology and piezoelectric acoustic materials to prepare the traditional bulk acoustic waves microfluidic chip.Then,combine the input of the AC signal,the characteristics of the piezoelectric material and the principle of the acoustic manipulation to test and optimize the performance of the chip,to achieve accurate manipulation,enrichment and separation of the micrometer particles.Next,we design a new bulk waves chip based on PDMS bonding layer.This chip is cheap and safe easy to prepare.Through testing,we prove the feasibility of our new type of bulk waves chip.By comparing the simulation and experimental results with the traditional chip,we analyze the advantages and disadvantages of the improved chip.The specific work contents can be divided into the following aspects:1.Based on the existing experimental conditions and the purpose of our experiment,we have prepared the traditional bulk waves chips capable of producing stable acoustic physical fields.Through the simulation experiment of silica microsphere,we achieved particle control,enrichment and separation on the acoustic microfluidic chip.The experimental results are optimized by adjusting the input signal size,signal source frequency and fluid flow rate.2.By spin coating a layer of PDMS membrane as a bonding layer,we prepared a new,simple and low cost of bulk acoustic waves chip,by optimizing the experimental parameters,the sandwich structure of the chip to realize high purity of the particle concentration.3,In combination with the experimental results and simulation software results,we compare the improved bulk waves chip and the traditional bulk waves chip,and analyze the advantages and disadvantages of the improved bulk waves chip.After optimizing the experimental parameters,we successfully aggregated 15 ?m silica spheres under a very low input power(21 dBm)and a flow velocity of 1 ml/h,and the enrichment efficiency was greater than 97%.