Preparation And Primary Property Study Of Piezoelectric Thin Film Bulk Acoustic Wave Liquid Sensor

In recent years, biosensors have become a focus for researchers, and the rapid development of thin film bulk acoustic wave technology and semiconductor technology also contribute to the miniaturization and integrated of sensors. In the1960s the piezoelectric biosensor has developed to a new type of biosensors which is piezoelectric thin film bulk acoustic wave sensor characterized small size, high sensitivity, high quality factor, low-loss, good temperature stability and the frequency can reach GHz range, which can be integrated with semiconductor process highlighting the advantages.In the coming information age, FBAR will have broad application prospects. However, the research of FBAR biosensors in domestic has remained mostly in the theoretical research, but only quality sensor is available, practical application of the device detection, especially the study of the liquid detection are less reported. Piezoelectric thin film bulk acoustic wave sensor working under Thickness Shear Mode which used for liquid environment detection are provided with low loss, high sensitivity which suitable for the field of biological detection. FBARs which integrated with microfluidic channel have low-cost, fast response time, small amount of sample and the unique advantages of easy operation, etc, providing a good solution for the miniaturization of biosensors.This paper mainly focused on the preparation of the SMR gravity sensor, which included the preparation of AIN piezoelectric thin film and Bragger acoustic reflection layers of SMR sensor. The studies of design and process and performance analysis of SMR sensor are also discussed. The main results and innovation of this paper are as follows:1.In this paper, radio frequency magnetron reactive sputtering is adopted, using two-step pressure method combine with off-center method in the optimization process, preparation of reproducible high preferred orientation of the C-axis inclined AIN thin film with X-ray diffraction peak was (002) orientation, has a good columnar grain structure and smooth surface. The films are able to stimulate the thickness shear mode acoustic wave for SMR liquid detection sensor, which laid the foundation for the subsequent preparation for the SMR biological sensors.2. The influence of sputtering conditions on the Mo/SiO2Bragger acoustic reflection layer is discussed. Acoustic reflection layers are prepared with the morphology of clear interface, smooth surface, uniform thickness, improving the mechanical robustness and the sound waves using efficiency and device. The semiconductor manufacturing process was used to prepare a complete SMR resonator device and the semiconductor preparation processes involved:stripping the mask design, lithography, electrode, the deposition of AIN films.3. Soft lithography process was used to integrate a polydimethylsiloxane (PDMS) microfluidic test pipe with SMR resonator. The test results show that the shear wave mode sensors have high sensitivity in the different types of liquid media, indicating that the thickness shear vibration mode acoustic wave inspired by the c-axis tilt AIN piezoelectric film fit for the liquid detection environment, which laid foundation for using in the fields of application of biological molecules, food hygiene, etc.