Research On Filter In Integrated Mixing Circuit For 300GHz On-chip Network Analyzer

With the rapid development of semiconductor manufacturing process and large scale integrated circuits,on-chip network analyzer has become a research focus in the field of millimeter and sub-millimeter wave measurement.The receiver circuit as an on-chip network analyzer is an important part of its technical indicators is to measure the performance of the on-chip network analyzer key factors,the filter as a frequency selection circuit,but also determine the receiving circuit performance of the important conditions.By analyzing the system components of the on-chip network analyzer,the technical specifications of the receiver in the on-chip network analyzer are discussed.Based on the analysis of the system specifications,the filters in the integrated mixer link for the on-chip network analyzer Technical indicators.In this paper,we analyzed the coplanar waveguide transmission line based on TSMC 90 nm CMOS technology and its discontinuous structure such as open stub,short stub,"T" junction and cross junction.Through analyzing the literature of a large number of coplanar waveguide filters at home and abroad,the design method and flow of coplanar waveguide low-pass filter and band-pass filter are studied.Finally,according to the modern network synthes is method,a three-stage filter for integrated on-chip network analyzer is designed.The first is a coplanar waveguide low-pass filter with an insertion loss of less than 2 d B at a cut-off frequency of 302 GHz and an insertion loss of more than 20 d B at a cut-off frequency of more than 1.5 times.Based on the theory of electromagnetic coupling,a second-level coplanar waveguide V-band narrowband bandpass filter and a third-level X-band bandpass filter are designed.The V band narrowband bandpass filter is inserted at a frequency of 60 GHz and a bandwidth of 4GHz Loss less than 2.5d B;X-band band-pass filter in the IF frequency of 10 GHz,the bandwidth of 4GHz insertion loss less than 1dB.